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Study on radiation defect profiles in silicon by elastic scattering of 4 He ions
Study on radiation defect profiles in silicon by elastic scattering of 4 He ions
1975
N.A. Skakun
A.N. Grigorev
N.P. Dikij
P.P. Matyash
L. I. Nikolajchuk
Keywords:
Ion
Elastic scattering
Radiation
Ion implantation
Silicon
Crystallographic defect
Semimetal
Scattering
Molecular physics
Materials science
Correction
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