A Polarizing Beam Splitter Based on Micro-Nano Multi-Subparts Resonant Grating

由于光栅对于TE和TM偏振光表现出不同的衍射性质，据此，基于硅基微纳多齿谐振光栅，我们设计了一种高性能的偏振分束器。严格耦合波理论分析方法表明，在C + L (1.53~1.62 μm)宽谱范围内，此器件拥有衍射效率大于97%，消光比大于16 dB，以及角度带宽为8˚等的优越性能。此外，我们还考察了结构参数变化对此光栅偏振分束器性能的影响。 Due to the different diffraction properties of gratings for TE and TM polarized wave, in this study, using the silicon based micro-nano multi-subparts resonant grating, we propose a high performance polarizing beam splitter (PBS). The properties of the grating PBS are investigated by rigorous coupled-wave analysis. It is shown that, over a broadband spectrum of 1.53 ~ 1.62μm (C + L band), the grating PBS demonstrates high diffraction efficiency (>97%) with extinction ratio (ER) greater than 16 dB and a comparatively wide angular bandwidth (about 8˚). Effects of deviation from the design parameters on the performance of the grating PBS are also presented.