Ablation of LiF and CsI by EUV Nanosecond Laser Pulse

In this chapter, we present results of study an interaction of nanosecond EUV laser pulses at a wavelength of 46.9 nm with lithium fluoride (LiF), caesium iodide (CsI) and golden (Au) samples. The laser beam is focused with a spherical Si/Sc multilayer-coated mirror on samples. Samples were irradiated with 1, 2, 5, 10 and 20 laser shots with various energies. At the same time, laser ablation plumes were observed. Ablation depth of craters was analysed by atomic force microscope (AFM).