Investigation of radiation-stable elements of CMOS VLSI on SOI substrates

A. Demchenko,V. Syakersky,S. V. Shvedov,V. Bondarenko,L. Dolgyi,Yu. V. Bogatyrev

Investigation of radiation-stable elements of CMOS VLSI on SOI substrates

2009

A. Demchenko
V. Syakersky
S. V. Shvedov
V. Bondarenko
L. Dolgyi
Yu. V. Bogatyrev

Experimental technique and influence of gamma irradiation on electrical characteristics of test elements (resistors, diodes, MOS transistors) fabricated in SOI structures are presented.

Keywords:

Physics
Radiation
CMOS
Resistor
Very-large-scale integration
Transistor
Electronic engineering
Silicon on insulator
Diode
Gamma ray
Optoelectronics

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