Analysis and application of a 01 order Talbot interferometer for 193 nm laser grating formation

Abstract We report the analysis, design and application of a Talbot interferometer in which the zero and first order beam from a grating are recombined. This interferometer produces fringes of the same period, d , as the master grating or phase mask rather than d 2 when the ±1 orders are employed. Experiments using the 0 1 Talbot interferometer with 193 nm ArF laser illumination to write gratings on polymers by ablation and photosensitive Bragg gratings in fibres are reported.