Permanent magnet suspending plane electromotor
2007
The invention discloses a permanent suspended flat electromotor which includes stator and rotor, the stator includes stator platform and solenoid loop array which is mounted on the stator platform, the solenoid loop possesses permanent-magnets whose magnetization direction are the same. The rotor includes rotor platform and permanent-magnet array which is attached to lower surface, the permanent-magnet array of lower surface of rotor platform include permanent-magnet array I and permanent-magnet array II whose number are the same and magnetization direction are contrary, two permanent-magnet arrays are distributed crossly. The invention possesses characters that structure is easy, speed of response is quick, stability is high, orientation is precise, and it fits for micro-electronics encapsulation and light etching equipment which need requirement of vacuum and super clean.
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