Modeling and Measurement of a HSQ Passivated UTC-PD with a 68.9 GHz Bandwidth

An InGaAs uni-traveling-carrier photodiode passivated using hydrogen silsesquioxane (HSQ) is reported. The device was fabricated and also simulated using 3D full-wave and equivalent circuit modeling. Both experimental and modeled results show a −3 dB frequency bandwidth of 68.9 GHz at −3 V bias.