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Influence of Deposition Conditions on the Characteristics of Luminescent Silicon Carbonitride Thin Films
Influence of Deposition Conditions on the Characteristics of Luminescent Silicon Carbonitride Thin Films
2018
Zahra Khatami
G. B. F. Bosco
J. Wojcik
Leandro R. Tessler
P. Mascher
Keywords:
Thin film
Chemistry
Inorganic chemistry
Silicon
Luminescence
Deposition (law)
Chemical engineering
Correction
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