Note: Electron energy spectroscopy mapping of surface with scanning tunneling microscope
2016
We report a novel scanning probe electron energy spectrometer (SPEES) which combines a double toroidal analyzer with a scanning tunneling microscope to achieve both topography imaging and electron energy spectroscopy mapping of surface in situ. The spatial resolution of spectroscopy mapping is determined to be better than 0.7 ± 0.2 μm at a tip sample distance of 7 μm. Meanwhile, the size of the field emission electron beam spot on the surface is also measured, and is about 3.6 ± 0.8 μm in diameter. This unambiguously demonstrates that the spatial resolution of SPEES technique can be much better than the size of the incident electron beam.
Keywords:
- Scanning confocal electron microscopy
- Nuclear magnetic resonance
- Scanning electron microscope
- Conventional transmission electron microscope
- Optics
- Physics
- Energy-dispersive X-ray spectroscopy
- Environmental scanning electron microscope
- Electron beam-induced deposition
- Scanning transmission electron microscopy
- Electron microscope
- Scanning tunneling microscope
- Scanning probe microscopy
- Scanning tunneling spectroscopy
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