Soft magnetic properties of Ni 81 Fe 19 film with different substrates used for micro-fluxgate

The soft magnetic properties of Ni 81 Fe 19 films respectively with Ti, Ta and Cr substrates used for micro-fluxgate have been studied in this paper. The films were characterized using transmission electron microscope (TEM), X-ray diffraction (XRD) and vibrating sample magnetometer (VSM). The testing results showed that Ta substrate film, due to its ladder rising hysteresis loop, is more appropriate for fluxgate core in these four kinds of Ni 81 Fe 19 films, film with no substrate and film with Ti substrate take the second place and the Cr substrate film would not be suitable as fluxgate core because of its bad soft magnetic properties.