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Improvement of Surface Flatness of Nitrogen-Polar AlN and Deep UV Emission from MQWs
Improvement of Surface Flatness of Nitrogen-Polar AlN and Deep UV Emission from MQWs
2020
Ryota Sakamoto
Kazuya Ataka
Tadatoshi Ito
Yongzhao Yao
Yukari Ishikawa
Narihito Okada
Kazuyuki Tadatomo
Keywords:
Nitrogen
Optoelectronics
Materials science
surface flatness
Polar
Correction
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