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504 Commercial Femtosecond Micromachining System for Sub-micron/sub-millimeter Scale Patterning
504 Commercial Femtosecond Micromachining System for Sub-micron/sub-millimeter Scale Patterning
2003
Egidijus Vanagas
Dmitry Tuzhilin
M. Zinkou
A. Sedunov
N. Vasiliev
Igor Kudryashov
V Kononov
Shoji Suruga
Keywords:
Surface micromachining
Micrometre
Bessel beam
Optics
Femtosecond
Millimeter
Materials science
Waveguide
Correction
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