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Microfabrication of Celluloid Microlens Array Using XeF 2 Vapor Etching and SUMP Method
Microfabrication of Celluloid Microlens Array Using XeF 2 Vapor Etching and SUMP Method
2017
Akihiro Matsutani
Ayako Takada
Keywords:
Celluloid
Sump
Etching
Microfabrication
Microlens
Optics
Materials science
Optoelectronics
Correction
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