Plasma-induced polymerized naphthalene film and its application for transmission electron microscopic study.

A plasma-induced polymerized naphthalene (PPN) film for the use of a replica method coupled with transmission electron microscopy (TEM) was studied in order to visualize the surface microstructures of various organic and inoraganic materials such as trenched silicon wafers and Langmuir-Blodgett (LB) films. As a result, we found that each PPN film examined had its smooth surface on the electron microscopic scale. We were able to visualize the surface microstructures of various materials.