Avalanche photodiode array device and formation method and laser three-dimensional imaging device
2013
The invention provides an avalanche photodiode array device and a formation method and a laser three-dimensional imaging device. The formation method of the avalanche photodiode array device comprises the steps of providing a substrate; forming an avalanche photodiode array on the front surface of the substrate; forming an isolating ring coiling at least one of two adjacent avalanche photodiodes, wherein the isolating ring is deeper than the avalanche photodiode and has the effect of insulating the two adjacent avalanche photodiodes. According to the method, the avalanche photodiode array is formed first and the isolating ring is formed second; or the isolating ring is formed first and the avalanche photodiode array is formed second; the avalanche photodiode array can be attached on the substrate with a CMOS control circuit in the presence of the isolating ring; the problem of complex formation method of the avalanche photodiode array on the substrate with the CMOS control circuit in the prior art can be solved.
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