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Thermal stability of AlON PVD diffusion barriers
Thermal stability of AlON PVD diffusion barriers
1998
R. Cremer
Markus Witthaut
Konstanze Reichert
M. Schierling
Dieter Neuschütz
Keywords:
Materials science
Sputter deposition
Metallurgy
Analytical chemistry
Thermal stability
Titanium
X-ray photoelectron spectroscopy
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