Substrate treating apparatus
2013
The present invention relates to a substrate processing apparatus. The substrate processing apparatus according to an embodiment of the present invention is a support member for supporting a substrate during processing step; The container is provided to surround an upper portion of the support member; A nozzle member having a nozzle for spraying the processing solution to a substrate positioned on the support member by spraying; And connected by piping to the nozzle includes a treatment liquid supply unit for supplying the treatment liquid.
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