Research of key technologies in microfabrication of terahertz thin film circuit on ultrathin quartz substrate

Terahertz frequency multipliers and mixers hybrid integrated with discrete GaAs planar Schottky diode and ultra-thin quartz substrate circuit structure is a low-cost and reliable solution. Micro-nano fabrication technology of plane integrated circuit and micromachining technology of geometric division of plane array integrated circuit on ultrathin quartz substrate are mainly discussed. Both of them are realized by the process of temporary bonding and de-bonding. The results showed that these technologies were suitable for terahertz thin film circuits on ultrathin quartz substrate. It is concluded that microfabrication technologies will have broad application prospect to achieve key components in the terahertz band.