A 100 kV Maskless Ion-Implantation System with an Au-Si-Be Liquid Metal Ion Source for III- V Compound Semiconductors

Heating effects in a liquid metal ion source G L R Mair and K L Aitken Liquid Metal Ion Sources: Normalization of Virtual Source Size and Angular Ion Intensity Tohru Ishitani, Kaoru Umemura and Yoshimi Kawanami Characteristics of Be–Si–Au Ternary Alloy Liquid Metal Ion Sources Kenji Gamo, Takao Matsui and Susumu Namba A New Droplet Breakup Model for Dimer Ion Formation from a Gallium Liquid Metal Ion Source Richard Hornsey and Tohru Ishitani Magic Numbers and Critical Sizes of Tin Clusters Emitted from a Liquid Metal Ion Source Makoto Watanabe, Yahachi Saito, Satoshi Nishigaki et al. Droplet and Cluster Ion Emission from Ga and In Liquid Metal Ion Sources Richard Hornsey and Tohru Ishitani Boron and Phosphorus Jon Emissions from a Cu–P–Pt–B Liquid Metal Ion Source Kaoru Umemura, Tohru Ishitani and Hifumi Tamura A 100 kV Maskless Ion-Implantation System with an Au–Si–Be Liquid Metal Ion Source for IIIV Compound Semiconductors