Effects of the Irradiation on Silicon by Femtosecond Laser of Various Energy Densities

The monocrystalline silicon sample was irradiatied by femtosecond laser in the air to fabricate a series of parallel etched grooves in the silicon surface,and the bottom of the etched grooves densely packed by micro/nano-particles.The treated silicon samples surface were displayed in black at various angles,while the micro/nano structure reduces the reflectivity of the silicon material and which could enhance the ability of light absorption to silicon material.In this paper,various energy densities of the femtosecond laser irradiated the silicon material to fabricate the micro/nano-particles which could reduce the reflectivity of the silicon,there was a special relationship founded between the energy densities and the formation of micro/nano-structures,only the suitable laser flux was conducive to the generation of micro/nano-particles.