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ZnO buffered platinized silicon substrates for high temperature oxide thin film synthesis.
ZnO buffered platinized silicon substrates for high temperature oxide thin film synthesis.
2011
Jon F. Ihlefeld
Kelsey Meyer
Geoffrey L. Brennecka
Chris T. Shelton
Brian Laughlin
Peter G. Lam
Jon-Paul Maria
Keywords:
Thin film
Oxide
Buffered oxide etch
Materials science
Inorganic chemistry
Silicon
Ceramic materials
Chemical engineering
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