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Laser Ablation Plasma Deposition and Ion Implantation of Hafnium and Hafnium-Oxide Thin Films*
Laser Ablation Plasma Deposition and Ion Implantation of Hafnium and Hafnium-Oxide Thin Films*
2005
Nicholas M. Jordan
Ronald M. Gilgenbach
M. Jones
Lumin M. Wang
Sha Zhu
Michael Atzmon
Dongchan Jang
Y. Y. Lau
Keywords:
Plasma
Deposition (law)
Thin film
Ion implantation
Plasma processing
Hafnium
Optoelectronics
Laser ablation
Pulsed laser deposition
Materials science
plasma deposition
Hafnium oxide
Correction
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