Broadband interferometric characterisation of nano-positioning stages with sub-10 pm resolution

A traceable calibration setup for investigation of the quasi-static and the dynamic performance of nano-positioning stages is detailed, which utilizes a differential plane-mirror interferometer with double-pass configuration from the National Physical Laboratory (NPL). An NPL-developed FPGA-based interferometric data acquisition and decoding system has been used to enable traceable quasi-static calibration of nano-positioning stages with high resolution. A lockin based modulation technique is further introduced to quantitatively calibrate the dynamic response of moving stages with a bandwidth up to 100 kHz and picometer resolution. First experimental results have proven that the calibration setup can achieve under nearly open-air conditions a noise floor lower than 10 pm/sqrt(Hz). A pico-positioning stage, that is used for nanoindentation with indentation depths down to a few picometers, has been characterized with this calibration setup.