Stability Condition Prediction of Integrated Opto-Mechanical Phaseshifters using Finite Element Analysis

Opto-mechanical gradient forces (F om ) can deflect suspended nano beams forming a slot waveguide. This deflection affects the distance between suspended beams and thus modifies the waveguide cross section. The changed waveguide cross section will modulate the effective refractive index (n eff ) and induces optical phaseshifts [1]. A slot waveguide in this work refers to a system of two parallel and suspended clamped beams, namely a relatively wide waveguide (WG), and a narrow nanostring (NS) of the same thickness as shown in (Fig. 1A).