WIDE RANGE OF ELECTROSTATIC ACTUATION MEMS FPOTF

By employing Microelectromechanical system (MEMS) technology, Fabry-Perot Optical Tunable Filter (FPOTF) with hybrid tuning mechanism, varying d and altering incident angle is presented. The proposed structure consists of a ∞oating dual membrane FPOTF with capability to be tuned at difierent light incident angles. Three electrostatic cavities have been designed to perform this task independently. This technique is capable to increase the tuning range up to 2/3 of capacitance gap with additional doubly range of incident angle. Optic, mechanic and electrostatic analysis of the proposed structure has been validated by simulation. Analysis in optical performance shows the tuning range enhancement is about 1.92% for §2 - mirror tilting at 6 - initial angle compared to conventional dual beam MEMS FPOTF. This analysis validates the principle of hybrid tuning method.