Old Web
English
Sign In
Acemap
>
Paper
>
Fabrication and measurement of FEA with a built-in electrostatic lens
Fabrication and measurement of FEA with a built-in electrostatic lens
2009
Tagami Tomoya
Koike Akifumi
Takagi Yasuo
Nagao Masayoshi
Yoshida Tomoya
Kanemaru Seigo
Neo Yoichiro
Aoki Toru
Mimura Hidenori
Keywords:
Electron-beam lithography
Fabrication
Optoelectronics
Electrostatic lens
Finite element method
Materials science
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]