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Freestanding Photoresist Film: A Versatile Template for Three‐Dimensional Micro‐ and Nanofabrication
Freestanding Photoresist Film: A Versatile Template for Three‐Dimensional Micro‐ and Nanofabrication
2020
Yuyang Liu
Ke Du
Ishan Wathuthanthri
Wei Xu
Chang-Hwan Choi
Keywords:
Nanolithography
Photoresist
Materials science
Nanotechnology
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