A modular approach for simulation-based optimization of MEMS

Abstract The importance of MEMS optimization concerning performance, power consumption, and reliability is increasing. A variety of specialized tools is available in the MEMS design flow. FEM tools (ANSYS, CFD-ACE+) are widely used on component level. System level simulations are carried out using simplified models and simulators like Saber or ELDO. There is a lack of simulator-independent optimization support. Only a few simulators offer optimization capabilities. Our approach aims at a flexible combination of simulators and optimization algorithms by partitioning the optimization cycle into simulation, error calculation, optimization and model generation. This new method is translated into a modular optimization system named Moscito implemented in Java. Several optimization algorithms are available: methods without derivatives, methods using derivatives and stochastic approaches. Interfaces to simulators like ANSYS, Saber, MATLAB are implemented. Thus the optimization problem can be handled on different levels of model abstraction (FEM, ordinary differential equations, generalized networks, block diagrams, etc.). A graphical user interface supports control and visualization of the optimization. The modules of the optimization system are able to communicate via the Internet to allow a distributed, web-based optimization.