Ablation of various materials with intense XUV radiation

Abstract Ablation behavior of organic polymer (polymethylmethacrylate) and elemental solid (silicon) irradiated by single pulses of XUV radiation emitted from Z-pinch, plasma-focus, and laser-produced plasmas was investigated. The ablation characteristics measured for these plasma-based sources will be compared with those obtained for irradiation of samples with XUV radiation generated by a free-electron laser.