The radiation-sensitive resin composition, the polymer and the resist pattern forming method

The present invention can obtain a good pattern shape, excellent MEEF performance, defects hardly occurs radiation-sensitive resin composition such as a bridge, the polymer preferably used in the radiation-sensitive resin composition, and its is intended to provide a pattern forming method using the radiation-sensitive resin composition is selected from the group consisting of [a] the following formulas (1-1) and a plurality of structural units respectively represented by (1-2) have at least one structural unit (I) that, polymer fluorine content is 5 mass% or more, it has a [B] acid-dissociable group, a fluorine atom content is less than 5 wt% polymer, and a radiation-sensitive resin composition containing [C] radiation-sensitive acid generator.