Finite element eddy current analysis in RF plasma devices with metal cooling system

An axially symmetric model for the calculation of eddy currents in 3D in inductively coupled RF plasma devices (plasma torch) with metal cooling systems is presented. This model is combining an analytical approach of the induced currents in the metallic parts of the cooling system with a finite element analysis previously elaborated in the case of a quartz confinement tube. The effect of temperature and motion on the electric conductivity is taken into account. The model is based on finite element method.