Fully integrated FBAR sensor matrix for mass detection
2009
Abstract A fully integrated Film Bulk Acoustic Resonator (FBAR) based mass detection sensor matrix was developed for label-free in-vitro DNA and protein diagnostics. A 64 pixels sensor matrix was post-processed on top of a CMOS readout circuitry at wafer level. A novel and patented resonance frequency detection method was developed. To our knowledge this is the first realized full integrated FBAR matrix sensor.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
3
References
20
Citations
NaN
KQI