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Latest Progress in Growth of Copper Thin Film by Atomic Layer Deposition
Latest Progress in Growth of Copper Thin Film by Atomic Layer Deposition
2016
Guo Qun
Guo Zheng
Sang Lijun
Wang Anling
Tian Xu
Yang Lizhen
Liu Zhongwei
Keywords:
Thin film
Chemical substance
Atomic layer deposition
Nanotechnology
Copper
Engineering
Science, technology and society
copper thin film
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