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Effect of Si Implantation Condition on the Performance of Polycrystalline Si Thin-Film Transistors
Effect of Si Implantation Condition on the Performance of Polycrystalline Si Thin-Film Transistors
1991
Mario Fuse
Yoshio Nishihara
M. Hirota
Toshihisa Hamano
I.-Wei Wu
A. Chiang
Keywords:
Thin-film transistor
Crystallite
Composite material
Materials science
Optoelectronics
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