Porous InP as Piezoelectric Matrix Material in 1-3 Magnetoelectric Composite Sensors

This work shows the results of the fabrication of semi-insulating piezoelectric porous InP struc- tures by electrochemical etching and subsequent purely chemical post-etching in an isotropic HF, HNO3, EtOH and HAc containing electrolyte. The piezoelectric modulus d14 of porous InP is measured to around |60| pm / V, which larger by a factor of 30 compared to bulk InP.