Old Web
English
Sign In
Acemap
>
Paper
>
Magneto-optical disk substrate prepared by reactive ion etching.
Magneto-optical disk substrate prepared by reactive ion etching.
1985
Kenji Ohta
Junji Hirokane
Tetsuya Inui
Akira Takahashi
Toshihisa Deguchi
Takaaki Okamoto
Keywords:
Dry etching
Optical disc
Magneto
Analytical chemistry
Reactive-ion etching
Substrate (chemistry)
Chemistry
magneto optical
Optoelectronics
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
8
Citations
NaN
KQI
[]