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Ka-Band MEMS Planar Phase Shifthers Using High Dielectric Constant Substrate
Ka-Band MEMS Planar Phase Shifthers Using High Dielectric Constant Substrate
2016
Aziz A. Abdel
A. S. Abdellatif
Suren Gigoyan
S. Ituah
R. M. Martirossyan
Raafat R. Mansour
Safieddin Safavi-Naeini
Keywords:
Gate dielectric
High-κ dielectric
Nuclear magnetic resonance
Planar
Ka band
Substrate (chemistry)
Microelectromechanical systems
Materials science
high dielectric constant substrate
Optoelectronics
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