Washing and rectifying tower for treating trichlorosilane synthesized tail gas

2012 
The invention discloses a washing and rectifying tower for treating trichlorosilane synthesized tail gas. The washing and rectifying tower comprises a tower body, the lower part of the tower body is provided with a synthesized tail gas inlet, the upper part of the tower body is provided with a washed gas outlet, and the tower body comprises a tower plate zone, a sieve plate zone and a baffle plate zone connected sequentially from top to bottom, wherein the baffle plate zone is positioned above the synthesized tail gas inlet, a herringbone baffle plate is radially arranged in the baffle plate zone, and the herringbone baffle plate is provided with an opening for removing solid impurities in the synthesized tail gas; a sieve plate is arranged in the sieve plate zone; and a plurality of layers of tower plates are arranged in the tower plate zone, and an overflow weir is arranged between the adjacent tower plates. According to the washing and rectifying tower provided by the embodiment of the invention, washing and rectifying separation of the synthesized tail gas are combined, and the washed gas released from the upper part of the washing and rectifying tower only contains extremely trace metal impurities, so that blockage of a subsequent system due to the deposition of the metal impurities can be reduced, and the operating stability and continuity of the washing and rectifying tower are improved.
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