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Status of the Coating Activities at the Magnetron Sputtering Facility
Status of the Coating Activities at the Magnetron Sputtering Facility
2014
M. C. Bellachioma
A. Krämer
C. Kolligs
J. Cavaco
J. Kurdal
Keywords:
Sputter deposition
Metallurgy
Coating
Materials science
Natural resource economics
Engineering physics
Engineering drawing
Correction
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