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The Effect of Y 2 O 3 Buffer Layer for La 2 O 3 Gate Dielectric Film
The Effect of Y 2 O 3 Buffer Layer for La 2 O 3 Gate Dielectric Film
2005
Kentaro Nakagawa
Kunihiro Miyauchi
Kuniyuki Kakushima
Takeo Hattori
Kazuo Tsutsui
Hiroshi Iwai
Keywords:
Gate dielectric
Inorganic chemistry
Chemistry
Materials science
Optoelectronics
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