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Study of Silicon Nitride Film for Rear Surface Passivation
Study of Silicon Nitride Film for Rear Surface Passivation
2013
Yoshio Ohshita
I. Sumita
Kyotaro Nakamura
Tetsuya Saruwatari
Daisuke Imai
Mari Aoki
T. Kojima
Atsufumi Ogishi
Ken Mishina
Keywords:
Silicon nitride
Passivation
Plasma-enhanced chemical vapor deposition
Materials science
Composite material
Optoelectronics
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