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Fluid Modeling of a Very High Frequency Capacitively Coupled Reactor
Fluid Modeling of a Very High Frequency Capacitively Coupled Reactor
2016
Rochan Upadhyay
Laxminarayan L. Raja
Peter L. G. Ventzek
Toshihiko Iwao
Kiyotaka Ishibashi
Keywords:
Materials science
very high frequency
fluid modeling
Mechanics
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