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Characterization and Process Development of CVD/ALD-based Cu(Mn)/Co(W) Interconnect System
Characterization and Process Development of CVD/ALD-based Cu(Mn)/Co(W) Interconnect System
2016
Kohei Shima
Yuan Tu
Bin Han
Hisashi Takamizawa
Hideharu Shimizu
Yasuo Shimizu
Takeshi Momose
Koji Inoue
Yasuyoshi Nagai
Yukihiro Shimogaki
Keywords:
Inorganic chemistry
Materials science
Nanotechnology
Interconnection
process development
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