Suede-structured ZnO film with flexible substrate by gradient temperature growth technology and its application

A suede-structured ZnO film grown at gradient temperatures with a flexible substrate, which is a B-doped ZnO transparent conductive film, is formed by adopting the MOCVD technology for film coating with PET or PEN as a flexible substrate, with diethyl zinc and water as the source materials and with borane diluted by hydrogen as the doped gases. The gradient temperature growth technology adopted in the film coating process comprises steps of growing a ZnO film on the substrate at the temperature of 120-130 DEG C and further growing a suede ZnO film at the temperature of 135-155 DEG C. The invention has the following advantages: firstly, the gradient temperature growth technology improves the characteristic of the interface between the PET or PEN substrate and the ZnO film; secondly, the PET and PEN materials of the substrate have low price and high transmittance, and are convenient for large scale of production and popularization; and finally, the obtained ZnO film can directly form a suede structure which helps light scattering.