MOSQue: a novel TCAD database system with efficient handling capability on measured and simulated data

A novel TCAD database system, MOSQue, is introduced. MOSQue is a database system for impurity profile and electric characteristics data. This system has an easy-to-use GUI which enables design engineers to refer to data for ULSI development systematically. MOSQue is also utilized on parameter tuning for process and device simulators for the purpose of precise design specifications as it efficiently administrates the relations on measured and simulated data.