High Power and High Repetition Nd: YAG Laser Pumped by cw Laser Diodes

Hiroshi Fujita,Masahiro Nakatsuka,T. Wang,K. Tsubakimoto,Yasushi Fujimoto,H. Yoshida,N. Miyanaga,Y. Izawa,S. Matsuoka,H. Kubomura,T. Kasamatsu,Takayuki Uchiyama,Hirofumi Miyajima,Hirofumi Kan

High Power and High Repetition Nd: YAG Laser Pumped by cw Laser Diodes

2005

Hiroshi Fujita
Masahiro Nakatsuka
T. Wang
K. Tsubakimoto
Yasushi Fujimoto
H. Yoshida
N. Miyanaga
Y. Izawa
S. Matsuoka
H. Kubomura
T. Kasamatsu
Takayuki Uchiyama
Hirofumi Miyajima
Hirofumi Kan

We have been developing a high repetition (5 kHz) and high power (5 kW) Nd: YAG laser system pumped by cw LDs for EUV lithography. Design concepts and experimental results will be reported.

Keywords:

Physics
Optoelectronics
Q-switching
Laser power scaling
Optics
Far-infrared laser
Injection seeder
Ti:sapphire laser
Laser pumping
Nd:YAG laser
Diode-pumped solid-state laser
Laser

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