Possible Application of Laser Doppler Displacement (LDD) System in Stepper Optical Lithography
1998
To accurately position the stages in optical stepper, laser interferometer is used. Recently, a new type of displacement transducer, called Laser Doppler Displacement (LLD) system is available. This paper proposes a scheme for possible adoption of LLD system in optical stepper, drastically reducing the cost factor.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI