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Topographical and structural investigations of phosphorous-doped silicon films
Topographical and structural investigations of phosphorous-doped silicon films
1998
K. Sorschag
H. Gold
J. Lutz
Friedemar Kuchar
M. Pippan
H. Nöll
Keywords:
Analytical chemistry
Doping
Chemistry
Silicon
Mineralogy
Inorganic chemistry
Nanotechnology
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