Fabrication of MEMS Microshutter Arrays for Cryogenic Applications

Technologies Inc., Seabrook, MD 20706 USA 4~he Catholic University of America, Washington D.C. 20064, USA *Phone: 301-286-7935, Fax: 301-286-1 672, kdenis@pop500.gsfc.nasa.gov Abstract: Two-dimensional MEMS microshutter arrays are being developed for use as a high contrast field selector for the Near Infrared Spectrograph (NIRSpec) on the James Webb Space Telescope (JWST). We present details of microshutter array fabrication and give results of work done to optimize the flatness of microshutter elements through film stress control for both room temperature and cryogenic (35K) operation. Keywords: microshutter, cryogenic, magnetic actuation, thin film stress