Surface nanopatterning of Al/Ti multilayer thin films and Al single layer by a low-fluence UV femtosecond laser beam

Abstract The effects of UV femtosecond laser beam with 76 MHz repetition rate on two types of thin films on Si substrate – the Al single layer thin film, and the multilayered thin film consisted of five Al/Ti bilayers (total thickness 130 nm) – were studied. The surface modification of the target was done by low fluences and different irradiation times, not exceeding ∼300 s. Nanopatterns in the form of femtosecond-laser induced periodic surface structures (fs-LIPSS) with periodicity of